Granted Patent
Utility
US 6,150,264 · App. 09/075,420
Method of manufacturing self-aligned silicide
Inventors:
Shu-Jen Chen, Ruoh-Haw Chang, Chih-Ching Hsu
Patented Case
View Patent ↗
Granted: Nov 21, 2000
Filed: May 8, 1998
Inventors
Shu-Jen Chen
Ruoh-Haw Chang
Chih-Ching Hsu
Assignee (at issue)
United Semiconductor Corp.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.