Granted Patent
Utility
US 6,150,285 · App. 09/099,057
Method for simultaneous deposition and sputtering of TEOS
Inventors:
Paul R. Besser, Minh Van Ngo
Patented Case
View Patent ↗
Granted: Nov 21, 2000
Filed: Jun 17, 1998
Inventors
Paul R. Besser
Minh Van Ngo
Assignee (at issue)
Advanced Micro Devices, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.