Granted Patent
Utility
US 6,151,349 · App. 09/368,208
Automatic fluorine control system
Inventors:
Mengxiong Gong, Jason R. Carlesi, Michael C. Binder, Palash P. Das
Patented Case
View Patent ↗
Granted: Nov 21, 2000
Filed: Aug 4, 1999
Inventors
Mengxiong Gong
Jason R. Carlesi
Michael C. Binder
Palash P. Das
Assignee (at issue)
Cymer, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.