Granted Patent
Utility
US 6,152,175 · App. 09/089,346
Process gas supply unit
Inventors:
Masahito Itoh, Toshiyasu Inagaki, Minoru Ueta, Masahiko Yada, Hiroshi Itafuji
Patented Case
View Patent ↗
Granted: Nov 28, 2000
Filed: Jun 3, 1998
Inventors
Masahito Itoh
Toshiyasu Inagaki
Minoru Ueta
Masahiko Yada
Hiroshi Itafuji
Assignee (at issue)
CKD Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.