Granted Patent
Utility
US 6,157,039 · App. 09/074,558
Charged particle beam illumination of blanking aperture array
Inventor:
Marian Mankos
Patented Case
View Patent ↗
Granted: Dec 5, 2000
Filed: May 7, 1998
Inventor
Marian Mankos
Assignee (at issue)
ETEC SYSTEMS, INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.