Granted Patent
Utility
US 6,158,941 · App. 09/228,305
Substrate transport apparatus with double substrate holders
Inventors:
Richard S. Muka, James C. Davis, Christopher Hofmeister
Patented Case
View Patent ↗
Granted: Dec 12, 2000
Filed: Jan 12, 1999
Inventors
Richard S. Muka
James C. Davis
Christopher Hofmeister
Assignee (at issue)
Brooks Automation GmbH
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.