Granted Patent
Utility
US 6,159,076 · App. 09/085,764
Slurry comprising a ligand or chelating agent for polishing a surface
Inventors:
Li Sun, Stanley M. Smith, Curtis W. Fouyer
Patented Case
View Patent ↗
Granted: Dec 12, 2000
Filed: May 28, 1998
Inventors
Li Sun
Stanley M. Smith
Curtis W. Fouyer
Assignee (at issue)
Komag, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.