Granted Patent
Utility
US 6,159,291 · App. 09/131,558
Substrate treating apparatus
Inventors:
Akihiko Morita, Joichi Nishimura, Masami Ohtani
Patented Case
View Patent ↗
Granted: Dec 12, 2000
Filed: Aug 10, 1998
Inventors
Akihiko Morita
Joichi Nishimura
Masami Ohtani
Assignee (at issue)
DAINIPPON SCREEN MFG. CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.