Granted Patent
Utility
US 6,159,871 · App. 09/086,811
Method for producing hydrogenated silicon oxycarbide films having low dielectric constant
Inventors:
Mark Loboda, Jeffrey A. Seifferly
Patented Case
View Patent ↗
Granted: Dec 12, 2000
Filed: May 29, 1998
Inventors
Mark Loboda
Jeffrey A. Seifferly
Assignee (at issue)
Dow Corning Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.