IP Library Granted Patent US 6,160,293
Granted Patent Utility
US 6,160,293 · App. 09/176,914

Sub-quarter micron silicon-on-insulator MOS field effect transistor with deep silicide contact layers

Inventors: Hideaki Onishi, Kiyotaka Imai
Patented Case View Patent ↗
Granted: Dec 12, 2000 Filed: Oct 22, 1998
Inventors
Hideaki Onishi
Kiyotaka Imai
Assignee (at issue)
NEC CORPORATION

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Quick Facts
Patent No.
US 6,160,293
App. No.
09/176,914
Filed
1998-10-22
Granted
2000-12-12
Kind
A