Granted Patent
Utility
US 6,160,623 · App. 09/490,475
Method for measuring an aberration of a projection optical system
Inventors:
Takayuki Uchiyama, Seiji Matsuura
Patented Case
View Patent ↗
Granted: Dec 12, 2000
Filed: Jan 24, 2000
Inventors
Takayuki Uchiyama
Seiji Matsuura
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.