Granted Patent
Utility
US 6,162,006 · App. 09/083,833
Stackable cassette for use with wafer cassettes
Inventors:
Ronald R. Stevens, Ravinder Aggarwal
Patented Case
View Patent ↗
Granted: Dec 19, 2000
Filed: May 22, 1998
Inventors
Ronald R. Stevens
Ravinder Aggarwal
Assignee (at issue)
ASM America, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.