Granted Patent
Utility
US 6,162,299 · App. 09/113,767
Multi-position load lock chamber
Inventor:
Ivo Raaijmakers
Patented Case
View Patent ↗
Granted: Dec 19, 2000
Filed: Jul 10, 1998
Inventor
Ivo Raaijmakers
Assignee (at issue)
ASM America, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.