Granted Patent
Utility
US 6,162,495 · App. 08/939,611
Protective overcoat for replicated diffraction gratings
Inventor:
Richard G. Morton
Patented Case
View Patent ↗
Granted: Dec 19, 2000
Filed: Sep 29, 1997
Inventor
Richard G. Morton
Assignee (at issue)
Cymer, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.