Granted Patent
Utility
US 6,162,684 · App. 09/266,714
Ammonia annealed and wet oxidized LPCVD oxide to replace ono films for high integrated flash memory devices
Inventors:
Kent Kuohua Chang, David Chi, Chin-Yang Sun
Patented Case
View Patent ↗
Granted: Dec 19, 2000
Filed: Mar 11, 1999
Inventors
Kent Kuohua Chang
David Chi
Chin-Yang Sun
Assignee (at issue)
Advanced Micro Devices, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.