Granted Patent
Utility
US 6,163,066 · App. 09/139,151
Porous silicon dioxide insulator
Inventors:
Leonard Forbes, Kie Y. Ahn
Patented Case
View Patent ↗
Granted: Dec 19, 2000
Filed: Aug 24, 1998
Inventors
Leonard Forbes
Kie Y. Ahn
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.