Granted Patent
Utility
US 6,165,650 · App. 09/310,521
Reticle cleaning without damaging pellicle
Inventor:
Matthew E. Williams
Patented Case
View Patent ↗
Granted: Dec 26, 2000
Filed: May 12, 1999
Inventor
Matthew E. Williams
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.