Granted Patent
Utility
US 6,165,694 · App. 09/023,235
Method for preventing the formation of recesses in borophosphosilicate glass
Inventor:
Tsan-Wen Liu
Patented Case
View Patent ↗
Granted: Dec 26, 2000
Filed: Feb 13, 1998
Inventor
Tsan-Wen Liu
Assignee (at issue)
United Semiconductor Corp.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.