Granted Patent
Utility
US 6,166,819 · App. 09/105,632
System and methods for optically measuring dielectric thickness in semiconductor devices
Inventor:
Rainer Florian Schnabel
Patented Case
View Patent ↗
Granted: Dec 26, 2000
Filed: Jun 26, 1998
Inventor
Rainer Florian Schnabel
Assignee (at issue)
Siemens Aktiengesellschaft
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.