Granted Patent
Utility
US 6,167,891 · App. 09/318,156
Temperature controlled degassification of deionized water for megasonic cleaning of semiconductor wafers
Inventors:
Stephan Kudelka, David L. Rath
Patented Case
View Patent ↗
Granted: Jan 2, 2001
Filed: May 25, 1999
Inventors
Stephan Kudelka
David L. Rath
Assignee (at issue)
Infineon Technologies North America Corp.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.