Granted Patent
Utility
US 6,168,085 · App. 09/461,151
System and method for cascade control of temperature and humidity for semi-conductor manufacturing environments
Inventor:
Kenneth P. Garcia
Patented Case
View Patent ↗
Granted: Jan 2, 2001
Filed: Dec 14, 1999
Inventor
Kenneth P. Garcia
Assignee (at issue)
Semifab Incorporated
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.