Granted Patent
Utility
US 6,168,900 · App. 09/036,995
Chemically amplified resist
Inventor:
Toshiro Itani
Patented Case
View Patent ↗
Granted: Jan 2, 2001
Filed: Mar 9, 1998
Inventor
Toshiro Itani
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.