Granted Patent
Utility
US 6,169,027 · App. 08/975,449
Method of removing surface oxides found on a titanium oxynitride layer using a nitrogen containing plasma
Inventor:
Christopher Dobson
Patented Case
View Patent ↗
Granted: Jan 2, 2001
Filed: Nov 21, 1997
Inventor
Christopher Dobson
Assignee (at issue)
Trikon Equipments Limited
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.