Granted Patent
Utility
US 6,169,036 · App. 09/276,034
Method for cleaning via openings in integrated circuit manufacturing
Inventors:
Siddhartha Bhowmik, Joseph W. Buckfeller, G. Craig Clabough, Sailesh Mansinh Merchant
Patented Case
View Patent ↗
Granted: Jan 2, 2001
Filed: Mar 25, 1999
Inventors
Siddhartha Bhowmik
Joseph W. Buckfeller
G. Craig Clabough
Sailesh Mansinh Merchant
Assignee (at issue)
LUCENT TECHNOLOGIES INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.