Granted Patent
Utility
US 6,169,652 · App. 09/268,166
Electrostatically screened, voltage-controlled electrostatic chuck
Inventor:
Leonard E. Klebanoff
Patented Case
View Patent ↗
Granted: Jan 2, 2001
Filed: Mar 12, 1999
Inventor
Leonard E. Klebanoff
Assignee (at issue)
EUV, L.L.C.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.