Granted Patent
Utility
US 6,172,409 · App. 08/883,625
Buffer grated structure for metrology mark and method for making the same
Inventor:
Hao Zhou
Patented Case
View Patent ↗
Granted: Jan 9, 2001
Filed: Jun 27, 1997
Inventor
Hao Zhou
Assignee (at issue)
Cypress Semiconductor Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.