Granted Patent
Utility
US 6,174,563 · App. 09/110,491
Method for forming thin metal films
Inventor:
Kazumi Sugai
Patented Case
View Patent ↗
Granted: Jan 16, 2001
Filed: Jul 6, 1998
Inventor
Kazumi Sugai
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.