Granted Patent
Utility
US 6,174,741 · App. 08/994,273
Method for quantifying proximity effect by measuring device performance
Inventors:
Wilfried Hansch, Frank Prein, Jurgen Faul
Patented Case
View Patent ↗
Granted: Jan 16, 2001
Filed: Dec 19, 1997
Inventors
Wilfried Hansch
Frank Prein
Jurgen Faul
Assignee (at issue)
Siemens Aktiengesellschaft
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.