Granted Patent
Utility
US 6,174,786 · App. 09/447,154
Shallow trench isolation method providing rounded top trench corners
Inventors:
Patrick J. Kelley, Ranbir Singh, Larry Bruce Fritzinger, Cynthia C. Lee, John Simon Molloy
Patented Case
View Patent ↗
Granted: Jan 16, 2001
Filed: Nov 23, 1999
Inventors
Patrick J. Kelley
Ranbir Singh
Larry Bruce Fritzinger
Cynthia C. Lee
John Simon Molloy
Assignee (at issue)
LUCENT TECHNOLOGIES INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.