Granted Patent
Utility
US 6,174,820 · App. 09/250,526
Use of silicon oxynitride as a sacrificial material for microelectromechanical devices
Inventors:
Scott D. Habermehl, Jeffry J. Sniegowski
Patented Case
View Patent ↗
Granted: Jan 16, 2001
Filed: Feb 16, 1999
Inventors
Scott D. Habermehl
Jeffry J. Sniegowski
Assignee (at issue)
Sandia Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.