Granted Patent
Utility
US 6,175,095 · App. 09/272,690
Resonant impedance-matching slow-wave ring structure microwave applicator for plasmas
Inventors:
Niles K. MacDonald, Terry L. White, James W. Caughran
Patented Case
View Patent ↗
Granted: Jan 16, 2001
Filed: Mar 18, 1999
Inventors
Niles K. MacDonald
Terry L. White
James W. Caughran
Assignee (at issue)
Gasonics International Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.