Granted Patent
Utility
US 6,176,987 · App. 08/788,408
System for and method of providing a controlled deposition of wafers
Inventors:
Robert George Begin, Peter J. Clarke
Patented Case
View Patent ↗
Granted: Jan 23, 2001
Filed: Jan 27, 1997
Inventors
Robert George Begin
Peter J. Clarke
Assignee (at issue)
Shamrock Technology Corp.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.