Granted Patent
Utility
US 6,176,992 · App. 09/201,929
Method and apparatus for electro-chemical mechanical deposition
Inventor:
Homayoun Talieh
Patented Case
View Patent ↗
Granted: Jan 23, 2001
Filed: Dec 1, 1998
Inventor
Homayoun Talieh
Assignee (at issue)
Nutool, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.