Granted Patent
Utility
US 6,177,218 · App. 09/270,487
Lithographic process for device fabrication using electron beam imaging
Inventors:
Joseph Allen Felker, James A. Liddle, Stuart Stanton
Patented Case
View Patent ↗
Granted: Jan 23, 2001
Filed: Mar 15, 1999
Inventors
Joseph Allen Felker
James A. Liddle
Stuart Stanton
Assignee (at issue)
LUCENT TECHNOLOGIES INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.