Granted Patent
Utility
US 6,177,331 · App. 09/089,406
Method for manufacturing semiconductor device
Inventor:
Hiroki Koga
Patented Case
View Patent ↗
Granted: Jan 23, 2001
Filed: Jun 3, 1998
Inventor
Hiroki Koga
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.