Granted Patent
Utility
US 6,177,670 · App. 09/235,667
Method of observing secondary ion image by focused ion beam
Inventor:
Yasuhiko Sugiyama
Patented Case
View Patent ↗
Granted: Jan 23, 2001
Filed: Jan 22, 1999
Inventor
Yasuhiko Sugiyama
Assignee (at issue)
SEIKO INSTRUMENTS INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.