Granted Patent
Utility
US 6,178,918 · App. 09/092,565
Plasma enhanced chemical processing reactor
Inventors:
Ron van Os, William J. Durbin, Richard H. Matthiesen, Dennis C. Fenske, Eric D. Ross
Patented Case
View Patent ↗
Granted: Jan 30, 2001
Filed: Jun 5, 1998
Inventors
Ron van Os
William J. Durbin
Richard H. Matthiesen
Dennis C. Fenske
Eric D. Ross
Assignee (at issue)
Applied Materials, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.