Granted Patent
Utility
US 6,179,950 · App. 09/252,698
Polishing pad and process for forming same
Inventors:
Guoqiang Zhang, Ralph V. Vogelgesang, Gregory Owen Potts, Henry F. Erk
Patented Case
View Patent ↗
Granted: Jan 30, 2001
Filed: Feb 18, 1999
Inventors
Guoqiang Zhang
Ralph V. Vogelgesang
Gregory Owen Potts
Henry F. Erk
Assignee (at issue)
MEMC Electronic Materials, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.