Granted Patent
Utility
US 6,179,955 · App. 09/317,138
Dry etching apparatus for manufacturing semiconductor devices
Inventors:
Eun-Hee Shin, Sung-bum Cho, Baik-Soon Choi, Young-Koo Lee
Patented Case
View Patent ↗
Granted: Jan 30, 2001
Filed: May 24, 1999
Inventors
Eun-Hee Shin
Sung-bum Cho
Baik-Soon Choi
Young-Koo Lee
Assignee (at issue)
SAMSUNG DISPLAY CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.