Granted Patent
Utility
US 6,179,974 · App. 09/414,717
Apparatus and methods for sputtering
Inventor:
Keith Edward Buchanan
Patented Case
View Patent ↗
Granted: Jan 30, 2001
Filed: Oct 12, 1999
Inventor
Keith Edward Buchanan
Assignee (at issue)
Trikon Holdings Limited
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.