Granted Patent
Utility
US 6,179,984 · App. 09/297,400
Circuitry and method for an electroplating plant or etching plant pulse power supply
Inventor:
Manfred Maurer
Patented Case
View Patent ↗
Granted: Jan 30, 2001
Filed: Apr 29, 1999
Inventor
Manfred Maurer
Assignee (at issue)
Atotech Deutschland GmbH
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.