Granted Patent
Utility
US 6,180,021 · App. 09/421,232
Method for etching
Inventors:
Douglas McLean, Bernard Feldman
Patented Case
View Patent ↗
Granted: Jan 30, 2001
Filed: Oct 20, 1999
Inventors
Douglas McLean
Bernard Feldman
Assignee (at issue)
Feldman Technology Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.