Granted Patent
Utility
US 6,180,472 · App. 09/361,219
Method for fabricating semiconductor device
Inventors:
Susumu Akamatsu, Toshitaka Hibi, Takehiko Ueda, Tadami Shimizu, Yoshiaki Kato, Tatsuya Obata, Toyoyuki Shimazaki
Patented Case
View Patent ↗
Granted: Jan 30, 2001
Filed: Jul 27, 1999
Inventors
Susumu Akamatsu
Toshitaka Hibi
Takehiko Ueda
Tadami Shimizu
Yoshiaki Kato
Tatsuya Obata
Toyoyuki Shimazaki
Assignee (at issue)
Matsushita Electronics Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.