Granted Patent
Utility
US 6,180,485 · App. 09/323,596
Methods of forming capacitors, DRAM arrays, and monolithic integrated circuits
Inventors:
Kunal R. Parekh, John K. Zahurak, Phillip G. Wald
Patented Case
View Patent ↗
Granted: Jan 30, 2001
Filed: Jun 1, 1999
Inventors
Kunal R. Parekh
John K. Zahurak
Phillip G. Wald
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.