Granted Patent
Utility
US 6,180,518 · App. 09/430,226
Method for forming vias in a low dielectric constant material
Inventors:
Nace Layadi, Sailesh Mansinh Merchant, Simon John Molloy, Pradip K. Roy
Patented Case
View Patent ↗
Granted: Jan 30, 2001
Filed: Oct 29, 1999
Inventors
Nace Layadi
Sailesh Mansinh Merchant
Simon John Molloy
Pradip K. Roy
Assignee (at issue)
LUCENT TECHNOLOGIES INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.