IP Library Granted Patent US 6,180,538
Granted Patent Utility
US 6,180,538 · App. 09/426,240

Process for fabricating an ONO floating-gate electrode in a two-bit EEPROM device using rapid-thermal-chemical-vapor-deposition

Inventors: Arvind Halliyal, Robert B. Ogle, Kenneth Wo-Wai Au, Steven K. Park
Patented Case View Patent ↗
Granted: Jan 30, 2001 Filed: Oct 25, 1999
Inventors
Arvind Halliyal
Robert B. Ogle
Kenneth Wo-Wai Au
Steven K. Park
Assignee (at issue)
Advanced Micro Devices, Inc.

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Quick Facts
Patent No.
US 6,180,538
App. No.
09/426,240
Filed
1999-10-25
Granted
2001-01-30
Kind
A