Granted Patent
Utility
US 6,180,541 · App. 09/189,800
Metal-organic (MO) chemical vapor deposition method and MO chemical vapor deposition reactor
Inventor:
Jae Hyun Joo
Patented Case
View Patent ↗
Granted: Jan 30, 2001
Filed: Nov 12, 1998
Inventor
Jae Hyun Joo
Assignee (at issue)
Hyundai Electronics Industries Co. Ltd.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.