Granted Patent
Utility
US 6,182,325 · App. 09/041,054
Chamber cleaning mechanism
Inventor:
Timothy L. Herman
Patented Case
View Patent ↗
Granted: Feb 6, 2001
Filed: Mar 10, 1998
Inventor
Timothy L. Herman
Assignee (at issue)
ADVANCED TECHNOLOGY & MATERIALS CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.