Granted Patent
Utility
US 6,182,513 · App. 09/219,794
Resonant sensor and method of making a pressure sensor comprising a resonant beam structure
Inventors:
Goeran Stemme, Edvard Kaelvesten
Patented Case
View Patent ↗
Granted: Feb 6, 2001
Filed: Dec 23, 1998
Inventors
Goeran Stemme
Edvard Kaelvesten
Assignee (at issue)
Radi Medical Systems AB
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.