Granted Patent
Utility
US 6,183,352 · App. 09/382,640
Slurry recycling apparatus and slurry recycling method for chemical-mechanical polishing technique
Inventor:
Shuu Kurisawa
Patented Case
View Patent ↗
Granted: Feb 6, 2001
Filed: Aug 25, 1999
Inventor
Shuu Kurisawa
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.